JPH05748Y2 - - Google Patents
Info
- Publication number
- JPH05748Y2 JPH05748Y2 JP9464188U JP9464188U JPH05748Y2 JP H05748 Y2 JPH05748 Y2 JP H05748Y2 JP 9464188 U JP9464188 U JP 9464188U JP 9464188 U JP9464188 U JP 9464188U JP H05748 Y2 JPH05748 Y2 JP H05748Y2
- Authority
- JP
- Japan
- Prior art keywords
- speaker
- hepa filter
- ceiling
- room
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 description 8
- 239000000428 dust Substances 0.000 description 7
- 238000009434 installation Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9464188U JPH05748Y2 (en]) | 1988-07-19 | 1988-07-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9464188U JPH05748Y2 (en]) | 1988-07-19 | 1988-07-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0216938U JPH0216938U (en]) | 1990-02-02 |
JPH05748Y2 true JPH05748Y2 (en]) | 1993-01-11 |
Family
ID=31319202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9464188U Expired - Lifetime JPH05748Y2 (en]) | 1988-07-19 | 1988-07-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05748Y2 (en]) |
-
1988
- 1988-07-19 JP JP9464188U patent/JPH05748Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0216938U (en]) | 1990-02-02 |
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